A Design Methodology for Micromechanical Bandpass Filters
نویسندگان
چکیده
resonators. Higher order means more complexity in design. A third-order high-Q 300 kHz micromechanical bandpass filter, with Q-adjustment and frequency tuning, is analyzed using a parameterized cell library, "NODAS," for schematic representation and behavioral HDL simulation. An equivalent SPICE model of the filter is derived, which enables simulation in SPICE and comparison to NODAS. Frequency response around the filter passband from NODAS simulation matches that from SPICE simulation to within 4%. Limitations of equivalent SPICE model are discussed. NODAS models have an advantage in simulating the effects of manufacturing variations, finite masses of beams, and actuator nonlinearity.
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